MEMS Intro_MEMSDrive

Single crystal silicon is 10x stronger than steel, perfectly elastic and stable

Stage is robust, repeatable, precise

Machining tolerance is < 1 micron

Providing nearly perfect alignment of moving platform to reference frame

High aspect ratio flexures

>20:1 aspect ratio

Providing design flexibility

Stiffness in travel dirction is > 1,000 times softer than in all other degrees of freedom

Ensures precise control of linear motion

MEMS actuator is based on a comb drive

Comb drives are capacitive actuators that utilize electrostatic forces that act between two electrically conductive combs

Combs are arranged so they never touch

When voltage is applied, it causes the combs to be drawn together, causing movement

The force (and movement) is proportional to the square of the applied voltage between the combs

US R&D Site

2832 E. Foothill Blvd., Pasadena, CA 91107, USA

General Inquiries: info@memsdrive.com

Media Communication: pr@memsdrive.com

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